Wide Range Si3N4 Optical Sensor Using Cascaded Mach-Zehnder Interferometer Coupled Ring Resonator
17 ott 2023
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Pubblicato online: 17 ott 2023
Ricevuto: 29 nov 2022
Accettato: 27 apr 2023
DOI: https://doi.org/10.2478/amns.2023.2.00697
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© 2023 Yuzhu Hu, published by Sciendo
This work is licensed under the Creative Commons Attribution 4.0 International License.
Hu, Yuzhu
Institute of Microelectronics of the Chinese Academy of SciencesBeijing, China
University of Chinese Academy of SciencesBeijing, China