Wide Range Si3N4 Optical Sensor Using Cascaded Mach-Zehnder Interferometer Coupled Ring Resonator
17 oct 2023
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Publicado en línea: 17 oct 2023
Recibido: 29 nov 2022
Aceptado: 27 abr 2023
DOI: https://doi.org/10.2478/amns.2023.2.00697
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© 2023 Yuzhu Hu, published by Sciendo
This work is licensed under the Creative Commons Attribution 4.0 International License.
Hu, Yuzhu
Institute of Microelectronics of the Chinese Academy of SciencesBeijing, China
University of Chinese Academy of SciencesBeijing, China