Wide Range Si3N4 Optical Sensor Using Cascaded Mach-Zehnder Interferometer Coupled Ring Resonator
Oct 17, 2023
About this article
Published Online: Oct 17, 2023
Received: Nov 29, 2022
Accepted: Apr 27, 2023
DOI: https://doi.org/10.2478/amns.2023.2.00697
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© 2023 Yuzhu Hu, published by Sciendo
This work is licensed under the Creative Commons Attribution 4.0 International License.
Hu, Yuzhu
Institute of Microelectronics of the Chinese Academy of SciencesBeijing, China
University of Chinese Academy of SciencesBeijing, China