Accesso libero

Automatic Identification of Surface Defects in Semiconductor Materials Based on Machine Learning

  
17 mar 2025
INFORMAZIONI SU QUESTO ARTICOLO

Cita
Scarica la copertina

Katari, M., Shanmugam, L., & Malaiyappan, J. N. A. (2024). Integration of AI and Machine Learning in Semiconductor Manufacturing for Defect Detection and Yield Improvement. Journal of Artificial Intelligence General science (JAIGS) ISSN: 3006-4023, 3(1), 418-431. Katari M. Shanmugam L. Malaiyappan J. N. A. ( 2024 ). Integration of AI and Machine Learning in Semiconductor Manufacturing for Defect Detection and Yield Improvement . Journal of Artificial Intelligence General science (JAIGS) ISSN: 3006-4023 , 3 ( 1 ), 418 - 431 . Search in Google Scholar

Susto, G. A., Terzi, M., & Beghi, A. (2017). Anomaly detection approaches for semiconductor manufacturing. Procedia Manufacturing, 11, 2018-2024. Susto G. A. Terzi M. Beghi A. ( 2017 ). Anomaly detection approaches for semiconductor manufacturing . Procedia Manufacturing , 11 , 2018 - 2024 . Search in Google Scholar

López de la Rosa, F., Sánchez-Reolid, R., Gómez-Sirvent, J. L., Morales, R., & Fernández-Caballero, A. (2021). A review on machine and deep learning for semiconductor defect classification in scanning electron microscope images. Applied Sciences, 11(20), 9508. López de la Rosa F. Sánchez-Reolid R. Gómez-Sirvent J. L. Morales R. Fernández-Caballero A. ( 2021 ). A review on machine and deep learning for semiconductor defect classification in scanning electron microscope images . Applied Sciences , 11 ( 20 ), 9508 . Search in Google Scholar

Zheng, X., Zheng, S., Kong, Y., & Chen, J. (2021). Recent advances in surface defect inspection of industrial products using deep learning techniques. The International Journal of Advanced Manufacturing Technology, 113, 35-58. Zheng X. Zheng S. Kong Y. Chen J. ( 2021 ). Recent advances in surface defect inspection of industrial products using deep learning techniques . The International Journal of Advanced Manufacturing Technology , 113 , 35 - 58 . Search in Google Scholar

Fan, S. K. S., Hsu, C. Y., Tsai, D. M., He, F., & Cheng, C. C. (2020). Data-driven approach for fault detection and diagnostic in semiconductor manufacturing. IEEE Transactions on Automation Science and Engineering, 17(4), 1925-1936. Fan S. K. S. Hsu C. Y. Tsai D. M. He F. Cheng C. C. ( 2020 ). Data-driven approach for fault detection and diagnostic in semiconductor manufacturing . IEEE Transactions on Automation Science and Engineering , 17 ( 4 ), 1925 - 1936 . Search in Google Scholar

Ren, Z., Fang, F., Yan, N., & Wu, Y. (2022). State of the art in defect detection based on machine vision. International Journal of Precision Engineering and Manufacturing-Green Technology, 9(2), 661-691. Ren Z. Fang F. Yan N. Wu Y. ( 2022 ). State of the art in defect detection based on machine vision . International Journal of Precision Engineering and Manufacturing-Green Technology , 9 ( 2 ), 661 - 691 . Search in Google Scholar

Nakazawa, T., & Kulkarni, D. V. (2019). Anomaly detection and segmentation for wafer defect patterns using deep convolutional encoder–decoder neural network architectures in semiconductor manufacturing. IEEE Transactions on Semiconductor Manufacturing, 32(2), 250-256. Nakazawa T. Kulkarni D. V. ( 2019 ). Anomaly detection and segmentation for wafer defect patterns using deep convolutional encoder–decoder neural network architectures in semiconductor manufacturing . IEEE Transactions on Semiconductor Manufacturing , 32 ( 2 ), 250 - 256 . Search in Google Scholar

Jin, C. H., Na, H. J., Piao, M., Pok, G., & Ryu, K. H. (2019). A novel DBSCAN-based defect pattern detection and classification framework for wafer bin map. IEEE Transactions on Semiconductor Manufacturing, 32(3), 286-292. Jin C. H. Na H. J. Piao M. Pok G. Ryu K. H. ( 2019 ). A novel DBSCAN-based defect pattern detection and classification framework for wafer bin map . IEEE Transactions on Semiconductor Manufacturing , 32 ( 3 ), 286 - 292 . Search in Google Scholar

Saqlain, M., Jargalsaikhan, B., & Lee, J. Y. (2019). A voting ensemble classifier for wafer map defect patterns identification in semiconductor manufacturing. IEEE Transactions on Semiconductor Manufacturing, 32(2), 171-182. Saqlain M. Jargalsaikhan B. Lee J. Y. ( 2019 ). A voting ensemble classifier for wafer map defect patterns identification in semiconductor manufacturing . IEEE Transactions on Semiconductor Manufacturing , 32 ( 2 ), 171 - 182 . Search in Google Scholar

Tsai, D. M., & Huang, C. K. (2018). Defect detection in electronic surfaces using template-based Fourier image reconstruction. IEEE Transactions on Components, Packaging and Manufacturing Technology, 9(1), 163-172. Tsai D. M. Huang C. K. ( 2018 ). Defect detection in electronic surfaces using template-based Fourier image reconstruction . IEEE Transactions on Components, Packaging and Manufacturing Technology , 9 ( 1 ), 163 - 172 . Search in Google Scholar

Tello, G., Al-Jarrah, O. Y., Yoo, P. D., Al-Hammadi, Y., Muhaidat, S., & Lee, U. (2018). Deep-structured machine learning model for the recognition of mixed-defect patterns in semiconductor fabrication processes. IEEE Transactions on Semiconductor Manufacturing, 31(2), 315-322. Tello G. Al-Jarrah O. Y. Yoo P. D. Al-Hammadi Y. Muhaidat S. Lee U. ( 2018 ). Deep-structured machine learning model for the recognition of mixed-defect patterns in semiconductor fabrication processes . IEEE Transactions on Semiconductor Manufacturing , 31 ( 2 ), 315 - 322 . Search in Google Scholar

Bhatt, P. M., Malhan, R. K., Rajendran, P., Shah, B. C., Thakar, S., Yoon, Y. J., & Gupta, S. K. (2021). Image-based surface defect detection using deep learning: A review. Journal of Computing and Information Science in Engineering, 21(4), 040801. Bhatt P. M. Malhan R. K. Rajendran P. Shah B. C. Thakar S. Yoon Y. J. Gupta S. K. ( 2021 ). Image-based surface defect detection using deep learning: A review . Journal of Computing and Information Science in Engineering , 21 ( 4 ), 040801 . Search in Google Scholar

Imoto, K., Nakai, T., Ike, T., Haruki, K., & Sato, Y. (2019). A CNN-based transfer learning method for defect classification in semiconductor manufacturing. IEEE Transactions on Semiconductor Manufacturing, 32(4), 455-459. Imoto K. Nakai T. Ike T. Haruki K. Sato Y. ( 2019 ). A CNN-based transfer learning method for defect classification in semiconductor manufacturing . IEEE Transactions on Semiconductor Manufacturing , 32 ( 4 ), 455 - 459 . Search in Google Scholar

Nakazawa, T., & Kulkarni, D. V. (2018). Wafer map defect pattern classification and image retrieval using convolutional neural network. IEEE Transactions on Semiconductor Manufacturing, 31(2), 309-314. Nakazawa T. Kulkarni D. V. ( 2018 ). Wafer map defect pattern classification and image retrieval using convolutional neural network . IEEE Transactions on Semiconductor Manufacturing , 31 ( 2 ), 309 - 314 . Search in Google Scholar

Cheon, S., Lee, H., Kim, C. O., & Lee, S. H. (2019). Convolutional neural network for wafer surface defect classification and the detection of unknown defect class. IEEE Transactions on Semiconductor Manufacturing, 32(2), 163-170. Cheon S. Lee H. Kim C. O. Lee S. H. ( 2019 ). Convolutional neural network for wafer surface defect classification and the detection of unknown defect class . IEEE Transactions on Semiconductor Manufacturing , 32 ( 2 ), 163 - 170 . Search in Google Scholar

Liu, M., Fai Cheung, C., Senin, N., Wang, S., Su, R., & Leach, R. (2020). On-machine surface defect detection using light scattering and deep learning. Journal of the Optical Society of America A, 37(9), B53-B59. Liu M. Fai Cheung C. Senin N. Wang S. Su R. Leach R. ( 2020 ). On-machine surface defect detection using light scattering and deep learning . Journal of the Optical Society of America A , 37 ( 9 ), B53 - B59 . Search in Google Scholar

Saqlain, M., Abbas, Q., & Lee, J. Y. (2020). A deep convolutional neural network for wafer defect identification on an imbalanced dataset in semiconductor manufacturing processes. IEEE Transactions on Semiconductor Manufacturing, 33(3), 436-444. Saqlain M. Abbas Q. Lee J. Y. ( 2020 ). A deep convolutional neural network for wafer defect identification on an imbalanced dataset in semiconductor manufacturing processes . IEEE Transactions on Semiconductor Manufacturing , 33 ( 3 ), 436 - 444 . Search in Google Scholar

Su, B., Chen, H., & Zhou, Z. (2021). BAF-detector: An efficient CNN-based detector for photovoltaic cell defect detection. IEEE Transactions on Industrial Electronics, 69(3), 3161-3171. Su B. Chen H. Zhou Z. ( 2021 ). BAF-detector: An efficient CNN-based detector for photovoltaic cell defect detection . IEEE Transactions on Industrial Electronics , 69 ( 3 ), 3161 - 3171 . Search in Google Scholar

Kim, E., Cho, S., Lee, B., & Cho, M. (2019). Fault detection and diagnosis using self-attentive convolutional neural networks for variable-length sensor data in semiconductor manufacturing. IEEE Transactions on Semiconductor Manufacturing, 32(3), 302-309. Kim E. Cho S. Lee B. Cho M. ( 2019 ). Fault detection and diagnosis using self-attentive convolutional neural networks for variable-length sensor data in semiconductor manufacturing . IEEE Transactions on Semiconductor Manufacturing , 32 ( 3 ), 302 - 309 . Search in Google Scholar

He, Y., Stoumpos, C. C., Hadar, I., Luo, Z., McCall, K. M., Liu, Z., … & Kanatzidis, M. G. (2021). Demonstration of energy-resolved γ-ray detection at room temperature by the CsPbCl3 perovskite semiconductor. Journal of the American Chemical Society, 143(4), 2068-2077. He Y. Stoumpos C. C. Hadar I. Luo Z. McCall K. M. Liu Z. Kanatzidis M. G. ( 2021 ). Demonstration of energy-resolved γ-ray detection at room temperature by the CsPbCl3 perovskite semiconductor . Journal of the American Chemical Society , 143 ( 4 ), 2068 - 2077 . Search in Google Scholar

Zhang Huanhuan,Cheng Shuaikai,Zhao Yan,Jing Junfeng,Su Zebin & Li Pengfei. (2024). Measurement of yarn apparent evenness based on modified Canny edge detection. The Journal of The Textile Institute(4),600-606. Huanhuan Zhang Shuaikai Cheng Yan Zhao Junfeng Jing Zebin Su Pengfei Li ( 2024 ). Measurement of yarn apparent evenness based on modified Canny edge detection . The Journal of The Textile Institute ( 4 ), 600 - 606 . Search in Google Scholar

Fan Li & Zhongxun Wang. (2024). A Zero-Watermarking Algorithm Based on Vortex-like Texture Feature Descriptors. Electronics(19),3906-3906. Li Fan Wang Zhongxun ( 2024 ). A Zero-Watermarking Algorithm Based on Vortex-like Texture Feature Descriptors . Electronics ( 19 ), 3906 - 3906 . Search in Google Scholar

Ding Lilei. (2024). Design of a Universal Image Classification and Recognition System Based on Tensorflow. Journal of Engineering System(1). Lilei Ding ( 2024 ). Design of a Universal Image Classification and Recognition System Based on Tensorflow . Journal of Engineering System ( 1 ). Search in Google Scholar

Lingua:
Inglese
Frequenza di pubblicazione:
1 volte all'anno
Argomenti della rivista:
Scienze biologiche, Scienze della vita, altro, Matematica, Matematica applicata, Matematica generale, Fisica, Fisica, altro