Numerical simulation of magnetization induction coupled discharge plasma discharge process

First, this paper analyzes the plasma discharge and fluid model, and constructs the plasma discharge model by drift-diffusion approximation control equation, heavy particle component control equation, electric field distribution and volume force calculation, and plasma chemical kinetic model. Next, the coupling mechanism of inductively coupled RF plasma and its discharge characteristics are analyzed. Finally, the magnetized inductively coupled plasma discharge is simulated numerically. The results demonstrate that the current flowing on an inductor coil develops quicker at 0.045T and then calms down with an increase in the supplied constant dynamic magnetic field power, but the coil voltage exhibits the reverse effect.